Developer flow check system and method thereof

Details Developer flow check system and method thereof Developer flow check system and method thereof

1996-11-22

1998-09-01

Dombroske, George

Measuring and testing

Volume or rate of flow

Using differential pressure

73861, 222 67, 118712, G01F 122

Patent

active

058013156

ABSTRACT:
A developer flow check system is capable of directly determining the actual amount of developer from a nozzle. The system includes: a pressure regulator; a reservoir connected to the pressure regulator; a valve connected to the reservoir; a developer nozzle connected to the valve; and a post nozzle developer flow check section connected to the developer nozzle, for adjusting the quantity of the developer actually injected to an wafer to conform to a preset quantity is developer. The post nozzle developer flow check section includes: a developer flow check tube arranged for receiving the developer delivered from said developer nozzle. A sensor detects movement of said display a developer flow controller connected to said sensor determines a time interval which developer flows through the tube and the quantity of developer is calculated thereby. a developer flow check system controller receiving a control signal from the developer flow controller, to control the actual developer flow.

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