Determining geometrical configuration of interconnect structure

Details Determining geometrical configuration of interconnect structure Determining geometrical configuration of interconnect structure

2006-06-23

2009-02-10

Dinh, Paul (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C716S030000, C716S030000, C716S030000

Reexamination Certificate

active

07490304

ABSTRACT:
Methods are disclosed for determining a geometrical configuration of an interconnect structure of a test structure without cross-sectioning or optical measurements. In one embodiment, the method includes obtaining simulation data correlating capacitance data, resistance data and geometrical configuration data for a plurality of interconnect structures having different geometrical configurations; measuring a capacitance value and a resistance value from the interconnect structure of the test structure; and determining the geometrical configuration of the interconnect structure by comparing the capacitance value and the resistance value to the simulation data.

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