Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2007-07-03
2007-07-03
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
C702S179000, C356S237200
Reexamination Certificate
active
10903125
ABSTRACT:
Apparatus for inspection of a surface, including irradiating optics which are adapted to irradiate the surface with an irradiating beam having an adjustable polarization. The apparatus further includes at least one detector, each detector being associated with a respective analyzer having an orientation and adapted to generate signals in response to light received via the analyzer from an irradiated area on the surface, one of the at least one detector being adapted to receive scattered light from the irradiated area. The apparatus also includes a controller which is adapted to direct the irradiating optics to irradiate the irradiated area and which, in response to calibration signals generated thereby at the at least one detector, is adapted to set the adjustable polarization and the orientation of the respective analyzer of each detector.
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Auerbach Ditza
Baer Adam
Applied Materials Israel, Ltd.
Fahmi Tarek N.
Giglio Bryan
Lauchman Layla G.
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