Detector objective lens

Details Detector objective lens Detector objective lens

1997-06-18

1999-04-20

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250396R, H01J 3712

Patent

active

058959173

ABSTRACT:
The invention relates to a detector objective lens and a charged particle am device with such a detector objective lens containing a main lens for focussing a charged particle beam on a specimen, which consists of a magnetic lens (60) and an electrostatic lens (61) and a detector (62) disposed in front of the magnetic lens (60) in the direction of the charged particle beam (2) for detecting the charged particles released at the specimen (8). An additional lens is provided for influencing the released charged particles, which generates an electrostatic and/or magnetic field and is disposed between the main lens and the detector, the fields of the main lens and said additional lens being substantially separated from each other.

REFERENCES:
patent: 4769543 (1988-09-01), Plies
patent: 4812651 (1989-03-01), Feuerbaum et al.

Affiliated with

Also associated with

Rating

Detector objective lens does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Detector objective lens, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Detector objective lens will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2249177