Detector for an electron microscope

Details Detector for an electron microscope Detector for an electron microscope

1983-02-09

1984-03-20

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, G01N 2300

Patent

active

044383320

ABSTRACT:
A detection system of an electron microscope comprises a number of detection elements which are arranged on ends of flexible optical conductor bundles which face a specimen. The other ends of the optical conductor bundles are optically coupled to a light passage block which is made of a clear material having a comparatively high refractive index. Each detection element can be separately read by means of a diaphragm system which is arranged between this block and a photomultiplier coupled thereto.

REFERENCES:
patent: 3351755 (1967-11-01), Hasler
patent: 3922546 (1975-11-01), Livesay
patent: 4149074 (1979-04-01), Schliepe et al.
patent: 4211924 (1980-07-01), Muller et al.

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