Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1976-08-25
1979-04-10
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
250397, H01J 3726
Patent
active
041490746
ABSTRACT:
A scanning transmission-type electron microscope including an annular-shaped detector disposed concentrically with respect to the optical axis of the microscope behind a specimen along the microscope beam path, and means for amplifying output signals generated by the detector. The detector comprises a scintillation detector and the microscope includes a photoelectron multiplier coupled to the detector and disposed outside the microscope beam. A curved light guide is also coupled to the detector and the photoelectron multiplier and includes a canal which extends through the light guide along the microscope axis for permitting the passage of a central ray cone of the electron beam of the microscope through the light guide.
REFERENCES:
patent: 3629579 (1971-12-01), Naitou
patent: 3835246 (1974-09-01), Muller et al.
patent: 3866077 (1975-02-01), Baker et al.
patent: 3995935 (1976-12-01), McCartney
patent: 4011005 (1977-03-01), Hawkes
"Scanning Transmission Electron Microscopy with Cambridge Stereoscan MKII", Swift et al., Jour. of Scientific Inst., 1969, Series 2, vol. 2, pp. 744-746.
Muller Karl-Heinz
Rindfleisch Volker
Schliepe Reinhard
Thieringer Hans-Martin
Anderson Bruce C.
Siemens Aktiengesellschaft
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