Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2007-04-17
2007-04-17
Pham, Hoa Q. (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
C356S632000
Reexamination Certificate
active
11273686
ABSTRACT:
An apparatus is disclosed for obtaining ellipsometric measurements from a sample. A probe beam is focused onto the sample to create a spread of angles of incidence. The beam is passed through a quarter waveplate retarder and a polarizer. The reflected beam is measured by a detector. In one preferred embodiment, the detector includes eight radially arranged segments, each segment generating an output which represents an integration of multiple angle of incidence. A processor manipulates the output from the various segments to derive ellipsometric information.
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Pham Hoa Q.
Stallman & Pollock LLP
Therma-Wave, Inc.
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