Detector and inspecting apparatus

Details Detector and inspecting apparatus Detector and inspecting apparatus

2011-04-19

2011-04-19

Kim, Robert (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S311000, C250S492200

Reexamination Certificate

active

07928382

ABSTRACT:
An inspecting apparatus for reducing a time loss associated with a work for changing a detector is characterized by comprising a plurality of detectors11, 12for receiving an electron beam emitted from a sample W to capture image data representative of the sample W, and a switching mechanism M for causing the electron beam to be incident on one of the plurality of detectors11, 12, where the plurality of detectors11, 12are disposed in the same chamber MC. The plurality of detectors11, 12can be an arbitrary combination of a detector comprising an electron sensor for converting an electron beam into an electric signal with a detector comprising an optical sensor for converting an electron beam into light and converting the light into an electric signal. The switching mechanism M may be a mechanical moving mechanism or an electron beam deflector.

REFERENCES:
patent: 5665968 (1997-09-01), Meisburger et al.
patent: 7084406 (2006-08-01), Knippelmeyer
patent: 2001/0017878 (2001-08-01), Nozoe et al.
patent: 2003/0116717 (2003-06-01), Knippelmeyer
patent: 2004/0065827 (2004-04-01), Kienzle et al.
patent: 2004/0238740 (2004-12-01), Kohama et al.
patent: 2005/0045821 (2005-03-01), Noji et al.
patent: 58-159192 (1985-05-01), None
patent: 60-065967 (1985-05-01), None
patent: 11-345585 (1999-12-01), None
patent: 2000-149853 (2000-05-01), None
patent: 2003-157791 (2003-05-01), None
patent: 2003-208865 (2003-07-01), None
patent: 2004-134374 (2004-04-01), None
patent: 2004-327121 (2004-11-01), None
International Search Report of PCT/JP2006/315812, date of mailing Nov. 21, 2006.
European Search Report dated Oct. 28, 2009, issued in corresponding European Patent Application No. 06782616.4.

Affiliated with

Also associated with

Rating

Detector and inspecting apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Detector and inspecting apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Detector and inspecting apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2729159