Detection of dishing and tilting using X-ray fluorescence

Details Detection of dishing and tilting using X-ray fluorescence Detection of dishing and tilting using X-ray fluorescence

2007-07-17

2007-07-17

Glick, Edward J. (Department: 2882)

X-ray or gamma ray systems or devices

Specific application

Fluorescence

C378S050000

Reexamination Certificate

active

11103071

ABSTRACT:
A method for testing a material applied to a surface of a sample includes directing an excitation beam, having a known beam-width and intensity cross-section, onto a region of the sample. An intensity of X-ray fluorescence emitted from the region responsively to the excitation beam is measured. A distribution of the material within the region is estimated, responsively to the measured intensity of the X-ray fluorescence and to the intensity cross-section of the excitation beam, with a spatial resolution that is finer than the beam-width.

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Lankosz article is furnished herewith (previously cited on Sep. 7, 2005) Lankosz et al., “Research in Quantitative X-ray Fluorescence Microanalysis of Patterned Thin Films,” Advances In X-Ray Analysis, vol. 43, 1999, pp. 497-503.
Reed Electronics Group, Semiconductor International, “Webcast Equipment Auction” (www.reed-electronics.com/semiconductor/), Dec. 15, 2005.

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