Handling: hand and hoist-line implements – Utilizing fluid pressure – Venturi effect
Reexamination Certificate
2006-12-05
2006-12-05
Crawford, Gene O. (Department: 3652)
Handling: hand and hoist-line implements
Utilizing fluid pressure
Venturi effect
C294S064300, C414S800000, C414S941000, C901S040000
Reexamination Certificate
active
07144056
ABSTRACT:
An end-effector includes multiple vortex chucks for supporting a wafer. Vortex chucks are located along the periphery of the end-effector to help prevent a flexible wafer from curling. The end-effector has limiters to restrict the lateral movement of a supported wafer. In one example, the end-effector has a detector for detecting the presence of a wafer. The detector is mounted at a shallow angle to allow the end-effector to be positioned close to a wafer to be picked-up, thereby allowing detection of deformed wafers contained in a wafer cassette. The shallow angle of the detector also minimizes the thickness of the end-effector. Also disclosed is a wafer station with features similar to that of the end-effector.
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Berger Alexander J.
Casarotti Sean A.
Kretz Frank E.
Chin Paul T.
Crawford Gene O.
Shenker Michael
Tru-Si Technologies Inc.
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