Detachable retaining ring

Details Detachable retaining ring Detachable retaining ring

2007-05-01

2007-05-01

Nguyen, Dung Van (Department: 3723)

Abrading

Machine

Rotary tool

C451S041000, C451S398000

Reexamination Certificate

active

11396839

ABSTRACT:
The present invention relates to an apparatus and method for polishing semiconductor substrates with improved throughput. Embodiments of the present invention eliminate load cups from a polishing system, hence improve throughput by reducing system footprint and substrate hand off. One embodiment provides an apparatus for polishing a substrate. The apparatus comprises a platen having a polishing pad supported thereon, a carrier head configured to hold the substrate and press the substrate against the polishing pad, and a retaining ring adapted to be attached to and detached from the carrier head, wherein the retaining ring is configured to receive the substrate while positioned on the polishing pad and detached from the carrier head.

REFERENCES:
patent: 5993302 (1999-11-01), Chen et al.
patent: 6159079 (2000-12-01), Zuniga et al.
patent: 6183354 (2001-02-01), Zuniga et al.
patent: 6419567 (2002-07-01), Glashauser
patent: 6533646 (2003-03-01), Volodarsky
patent: 6645057 (2003-11-01), Quek
patent: 6705932 (2004-03-01), Zuniga et al.
patent: 6746313 (2004-06-01), Pham et al.
patent: 6866571 (2005-03-01), Held
patent: 6890249 (2005-05-01), Zuniga et al.
patent: 6913669 (2005-07-01), Ensinger
patent: 6932679 (2005-08-01), Telieh et al.
patent: 6974371 (2005-12-01), Chen et al.
patent: 2003/0114087 (2003-06-01), Duboust et al.
patent: 2005/0037598 (2005-02-01), Zuniga et al.
patent: 2005/0126708 (2005-06-01), Chen et al.
patent: 2005/0142993 (2005-06-01), Chen et al.
patent: 2005/0211377 (2005-09-01), Chen et al.
patent: 2005/0282322 (2005-12-01), Manens et al.

Affiliated with

Also associated with

Rating

Detachable retaining ring does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Detachable retaining ring, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Detachable retaining ring will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3771998