Deposition of thick BPSG layers as upper and lower cladding...

Details Deposition of thick BPSG layers as upper and lower cladding... Deposition of thick BPSG layers as upper and lower cladding...

2006-06-13

2006-06-13

Pak, Sung (Department: 2874)

Optical waveguides

Planar optical waveguide

C385S131000, C065S386000

Reexamination Certificate

active

07062141

ABSTRACT:
Undercladding and uppercladding layers that form part of an optical waveguide are deposited with a thermal CVD technique. The optical waveguide has a structure in which optical cores are formed over the undercladding layer and in which the uppercladding layer is formed over and between the optical cores. Generally, the optical cores have a refractive index greater than a refractive index of the cladding layers. A borophosphosilicate-glass layer may be used as one or both of the cladding layers. Thick cladding layers may be formed by cyclically depositing and annealing portions of the layer.

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