Dense SOI programmable logic array structure

Details Dense SOI programmable logic array structure Dense SOI programmable logic array structure

1998-03-17

2000-04-04

Thomas, Tom

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257353, 257354, 257374, 257383, 257499, 257506, 257508, 257510, 257520, H01L 2701

Patent

active

060464771

ABSTRACT:
A semiconductor device array having silicon device islands isolated from the substrate by an insulator. High array density is achieved by forming source and drain interconnects in the space between the islands. Also disclosed are processes for forming and programming such arrays.

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patent: 5732014 (1998-03-01), Forbes
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