Dense arrays and charge storage devices

Details Dense arrays and charge storage devices Dense arrays and charge storage devices

2006-10-31

2006-10-31

Weiss, Howard (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

Reexamination Certificate

active

07129538

ABSTRACT:
There is provided a monolithic three dimensional array of charge storage devices which includes a plurality of device levels, wherein at least one surface between two successive device levels is planarized by chemical mechanical polishing.

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