Measuring and testing – Volume or rate of flow – Thermal type
Reexamination Certificate
2005-03-15
2005-03-15
Williams, Hezron (Department: 2856)
Measuring and testing
Volume or rate of flow
Thermal type
C588S260000, C134S180000
Reexamination Certificate
active
06865937
ABSTRACT:
Methods and apparatus are provided for increasing the safety of a clogged or failed exhaust system. In accordance with a first embodiment, an apparatus is provided that includes (1) a tank adapted to contain a processing fluid; (2) an exhaust system coupled to the tank and adapted to exhaust a gas from the tank, the gas including a hazardous vapor of the processing fluid; (3) a sensor coupled to the exhaust system and adapted to detect a rate at which gas is exhausted from the tank; and (4) a fluid supply mechanism adapted to supply a diluting fluid to the tank so as to dilute the processing fluid contained by the tank if the rate at which gas is exhausted from the tank is less than a predetermined rate. Systems, methods and computer program products are provided in accordance with this and other embodiments.
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Banks, Jonathan, “Development in film cleaning technologies to provide a practical alternative to the use of chlorinated solvents”.
Borgaonkar Harshad M
Lerner Alexander N
Applied Materials Inc.
Dugan & Dugan
Rogers David A.
Williams Hezron
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