Deformable mirror device with oscillating states for...

Details Deformable mirror device with oscillating states for... Deformable mirror device with oscillating states for...

2011-06-07

2011-06-07

Le, Que T (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C250S216000

Reexamination Certificate

active

07956319

ABSTRACT:
A mirror device including: a mirror arranged on a substrate, supported by a hinge, and arranged substantially parallel to the substrate; a plurality of address electrodes for deflecting the mirror to an ON state, an OFF state, or an oscillating state; and a drive circuit for applying a voltage to the plurality of address electrodes. The mirror device is controlled such that a voltage can be applied to a corresponding address electrode to deflect the mirror, and oscillation in the oscillating state can be started from a state of the deflected mirror.

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