Deformable mirror device and manufacturing method thereof

Details Deformable mirror device and manufacturing method thereof Deformable mirror device and manufacturing method thereof

1996-04-25

1997-12-16

Ben, Loha

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359846, 359224, G02B 2600

Patent

active

056991819

ABSTRACT:
A deformable mirror device and a manufacturing method thereof, which decreases the possibility of damage to a substrate having an address scanning circuit and increases the efficiency of light reflection of a moving mirror. First and second moving mirrors and first and second posts are fabricated on a substrate. An address scanning circuit (SRAM) is fabricated on another substrate, independently. Finally, both the substrates are combined. The second post is vertically formed by sputtering after the second moving mirror is formed.

REFERENCES:
patent: 5083857 (1992-01-01), Hornbeck
patent: 5212582 (1993-05-01), Nelson
patent: 5497262 (1996-03-01), Kaeriyama
patent: 5583688 (1996-12-01), Hornbeck
Larry J. Hornbeck, "Current Status of the Digital Micromirror Device (DMD) for Projection Television Applications", Dec. 1993.

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