Deformable mirror device

Optical: systems and elements – Optical modulator – Light wave directional modulation

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Details

359223, 359318, G02B 2608

Patent

active

059781289

ABSTRACT:
A deformable mirror device for changing a proceeding path of an incident light includes a substrate, a pair of posts protruding from the upper surface of the substrate and spaced a predetermined distance from each other, an electrode formed on the upper surface of the substrate, a reflection mirror arranged to face the electrode by being supported by the posts, and first and second support pieces having predetermined rigidities for supporting the reflection mirror. The support pieces are connected between the reflection mirror and the posts so that an inclination of the reflection mirror can be adjusted by an electrostatic attraction between the electrode and the reflection mirror. The electrode is arranged to be offset from the reflection mirror such that a magnitude of the forces applied to the electrode at the positions between each of the first and second support pieces and the reflection mirror differ from each other. Therefore, in the deformable mirror device, the path of light can be easily changed with a low driving voltage.

REFERENCES:
patent: 5739941 (1998-04-01), Knipe et al.
patent: 5774604 (1998-06-01), McDonald
patent: 5917647 (1999-06-01), Yoon

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