Deformable MEMS mirror with membrane actuated by application...

Details Deformable MEMS mirror with membrane actuated by application... Deformable MEMS mirror with membrane actuated by application...

2006-02-14

2006-02-14

Tamai, Karl (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C359S224200, C359S226200, C359S291000, C385S018000

Reexamination Certificate

active

06998758

ABSTRACT:
A MEMS device having a deformable mirror. In a representative embodiment, the MEMS device includes a deformable membrane supporting a plurality of light-reflecting segments that form the deformable mirror. One or more actuators, at least one of which is configured to apply torque to a side of the membrane, are used to deform the membrane. Membrane deformation causes the segments to change orientation and thereby change the shape of the minor. A representative MEMS device of the invention enables segment displacements in two directions and thereby realizes effective mirror curvature values in the range from about −2 mm−1to about +2 mm−1.

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