Defective product inspection apparatus, probe positioning...

Details Defective product inspection apparatus, probe positioning... Defective product inspection apparatus, probe positioning...

2007-11-20

2007-11-20

Vanore, David (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C324S758010

Reexamination Certificate

active

11002710

ABSTRACT:
For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.

REFERENCES:
patent: 6191598 (2001-02-01), Hollman
patent: 6198299 (2001-03-01), Hollman
patent: 6621282 (2003-09-01), Hollman
patent: 6744268 (2004-06-01), Hollman
patent: 2002/0000819 (2002-01-01), Hollman
patent: 2003/0042921 (2003-03-01), Hollman
patent: 2004/0056672 (2004-03-01), Hollman
patent: 9-26436 (1997-01-01), None
patent: 9-326425 (1997-12-01), None
patent: 2000-147070 (2000-05-01), None
patent: 2002-181898 (2002-06-01), None
patent: 2002-523784 (2002-07-01), None
patent: 2003-309153 (2003-10-01), None

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