Defect inspection method

Details Defect inspection method Defect inspection method

2007-02-20

2007-02-20

Bali, Vikkram (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

Reexamination Certificate

active

10081782

ABSTRACT:
An image picked up by a detection system capable of actualizing a three-dimensional inclination is usually poor in the signal-to-noise ratio, and it is difficult to stably detect minute defects. Images that actualize a three-dimensional inclination are picked up from opposed directions. The images are subject to subtraction and addition. The images improved in signal-to-noise ratio as compared with original images are calculated. The images calculated and improved in signal-to-noise ratio respectively of a defect portion and a reference portion are compared with each other. Regions differing in comparison results are detected as defects. As a result, minute defects can be inspected stably.

REFERENCES:
patent: 5659172 (1997-08-01), Wagner et al.
patent: 6947587 (2005-09-01), Maeda et al.
patent: 6965429 (2005-11-01), Honda et al.
patent: 01-143127 (1989-06-01), None
Berhold Klaus Paul Horn, “Reflectance Map: Shape from Shading,”Robot Vision(1986), The MIT Press (Boston), pp. 245-277.

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