Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2006-10-31
2006-10-31
Hollington, Jermele (Department: 2829)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S701000
Reexamination Certificate
active
07129727
ABSTRACT:
A defect inspecting apparatus in which a plurality of probes to measure electric characteristics of a sample including a fine wiring pattern are combined with a charged-particle beam unit includes graphic user interfaces (GUI) to simply control the plural probes. The apparatus includes a probe image processing unit to display the plural probes on a display; a selecting unit to select, from the probes displayed on the display, a probe to be operated; and a display unit to simultaneously display the probe selecting unit and information indicating that the selected probe is an operable probe, or the probe is in a non-selected state.
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Hazaki Eiichi
Inada Yoshikazu
Nara Yasuhiko
Numata Yoshinori
Saito Tsutomu
Hitachi High-Technologies Corporation
Hollington Jermele
McDermott Will & Emery LLP
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