Defect detection using energy spectrometer

Details Defect detection using energy spectrometer Defect detection using energy spectrometer

2007-10-02

2007-10-02

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S310000, C250S305000

Reexamination Certificate

active

11092545

ABSTRACT:
One embodiment disclosed relates to an apparatus for detecting defects in substrates. An irradiation source is configured to generate an incident beam, and a lens system configured to focus the incident beam onto a target substrate so as to cause emission of electrons. A multiple-bin detector is configured to detect the emitted electrons, and each bin of the detector detects the emitted electrons within a range of energies. A processing system configured to process signals from the multiple-bin detector. Other embodiments are also disclosed.

REFERENCES:
patent: 4760254 (1988-07-01), Pierce et al.
patent: 4972142 (1990-11-01), Brust
patent: 6038018 (2000-03-01), Yamazaki et al.
patent: 6066849 (2000-05-01), Masnaghetti et al.
patent: 6310341 (2001-10-01), Todokoro et al.
patent: 6399945 (2002-06-01), Hirayanagi
patent: 6872944 (2005-03-01), Todokoro et al.
patent: 6949745 (2005-09-01), Yonezawa
patent: 6992287 (2006-01-01), Sullivan
patent: 7049591 (2006-05-01), Todokoro et al.
patent: 2004/0051041 (2004-03-01), Todokoro et al.
patent: 2005/0133719 (2005-06-01), Todokoro et al.

Affiliated with

Also associated with

Rating

Defect detection using energy spectrometer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Defect detection using energy spectrometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Defect detection using energy spectrometer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3891488