Defect analysis using a yield vehicle

Details Defect analysis using a yield vehicle Defect analysis using a yield vehicle

2007-10-16

2007-10-16

Do, Thuan (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C716S030000, C716S030000

Reexamination Certificate

active

11247517

ABSTRACT:
A system and method for collecting and analyzing optical inspection results obtained during the manufacturing process and comparing those results to actual functional results of a specially designed test vehicle integrated circuit. The test vehicle integrated circuit allows failures to be localized to very small areas, which allows more accurate correlation between inspection faults and functional failures. The correlation of inspection faults to actual functional failures is used to change the sensitivity settings for an optical inspection system to more accurately detect defects that are likely to be functional failures.

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