Defect analysis using a yield vehicle

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C716S030000, C716S030000

Reexamination Certificate

active

11247517

ABSTRACT:
A system and method for collecting and analyzing optical inspection results obtained during the manufacturing process and comparing those results to actual functional results of a specially designed test vehicle integrated circuit. The test vehicle integrated circuit allows failures to be localized to very small areas, which allows more accurate correlation between inspection faults and functional failures. The correlation of inspection faults to actual functional failures is used to change the sensitivity settings for an optical inspection system to more accurately detect defects that are likely to be functional failures.

REFERENCES:
patent: 5299204 (1994-03-01), Daniel
patent: 5674651 (1997-10-01), Nishi
patent: 6092223 (2000-07-01), Ahn
patent: 6436741 (2002-08-01), Sato et al.
patent: 6483176 (2002-11-01), Noguchi et al.
patent: 6707064 (2004-03-01), Jang et al.
patent: 6781151 (2004-08-01), Schultz et al.
patent: 6861864 (2005-03-01), Schultz
patent: 6885950 (2005-04-01), Mitsutake et al.
patent: 2004/0031008 (2004-02-01), Satoh et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Defect analysis using a yield vehicle does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Defect analysis using a yield vehicle, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Defect analysis using a yield vehicle will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3872959

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.