Decoupled stacked bulk acoustic resonator band-pass filter...

Details Decoupled stacked bulk acoustic resonator band-pass filter... Decoupled stacked bulk acoustic resonator band-pass filter...

2008-07-15

2008-07-15

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S189000, C333S192000, C310S326000, C310S334000

Reexamination Certificate

active

10965541

ABSTRACT:
The band-pass filter has an upper film bulk acoustic resonator (FBAR), an upper FBAR stacked on the lower FBAR, and, between the FBARs, an acoustic decoupler comprising a layer of acoustic decoupling material. Each of the FBARs has opposed planar electrodes and a piezoelectric element between the electrodes. The acoustic decoupler controls the coupling of acoustic energy between the FBARs. Specifically, the acoustic decoupler couples less acoustic energy between the FBARs than would be coupled by direct contact between the FBARs. The reduced acoustic coupling gives the band-pass filter desirable in-band and out-of-band properties.

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