Decoupled chamber body

Details Decoupled chamber body Decoupled chamber body

2006-01-13

2010-12-07

Stashick, Anthony (Department: 3781)

Material or article handling

Apparatus for moving material between zones having different...

C414S939000, C220S004260, C220S004270

Reexamination Certificate

active

07845891

ABSTRACT:
Embodiments of the invention include a chamber body having at least one of a top or bottom decoupled from the sidewalls of the chamber body. The invention is suitable for use as a load lock chamber, substrate transfer chamber and vacuum processing chambers, among others.

REFERENCES:
patent: 3248119 (1966-04-01), Smith et al.
patent: 3976330 (1976-08-01), Babinski et al.
patent: 4047624 (1977-09-01), Dorenbos
patent: 4178113 (1979-12-01), Beaver, II et al.
patent: 4311542 (1982-01-01), Mueller et al.
patent: 4512391 (1985-04-01), Harra
patent: 4655584 (1987-04-01), Tanaka et al.
patent: 4680061 (1987-07-01), Lamont, Jr.
patent: 4687542 (1987-08-01), Davis et al.
patent: 4693777 (1987-09-01), Hazano et al.
patent: 4709655 (1987-12-01), Van Mastrigt
patent: 4759681 (1988-07-01), Nogami
patent: 4770590 (1988-09-01), Hugues et al.
patent: 4775281 (1988-10-01), Prentakis
patent: 4784377 (1988-11-01), Woodward
patent: 4785962 (1988-11-01), Toshima
patent: 4801241 (1989-01-01), Zajac et al.
patent: 4816098 (1989-03-01), Davis et al.
patent: 4828224 (1989-05-01), Crabb et al.
patent: 4836733 (1989-06-01), Hertel et al.
patent: 4846102 (1989-07-01), Ozias
patent: 4857689 (1989-08-01), Lee
patent: 4863547 (1989-09-01), Shidahara et al.
patent: 4870923 (1989-10-01), Sugimoto
patent: 4880349 (1989-11-01), Woodward
patent: 4889319 (1989-12-01), Phillips et al.
patent: 4895107 (1990-01-01), Yano et al.
patent: 4911103 (1990-03-01), Davis et al.
patent: 4913929 (1990-04-01), Moslehi et al.
patent: 4923584 (1990-05-01), Bramhall, Jr. et al.
patent: 4951601 (1990-08-01), Mayden et al.
patent: 4952299 (1990-08-01), Chrisos et al.
patent: 4966519 (1990-10-01), Davis et al.
patent: 4989543 (1991-02-01), Schmitt
patent: 4990047 (1991-02-01), Wagner et al.
patent: 5001327 (1991-03-01), Hirasawa et al.
patent: 5020475 (1991-06-01), Crabb et al.
patent: 5044871 (1991-09-01), Davis et al.
patent: 5060354 (1991-10-01), Chizinsky
patent: 5131460 (1992-07-01), Krueger
patent: 5186718 (1993-02-01), Tepman et al.
patent: 5187115 (1993-02-01), Coleman
patent: 5199483 (1993-04-01), Bahng
patent: 5202716 (1993-04-01), Tateyama et al.
patent: 5224809 (1993-07-01), Maydan et al.
patent: 5227708 (1993-07-01), Lowrance
patent: 5247424 (1993-09-01), Harris et al.
patent: 5252807 (1993-10-01), Chizinsky
patent: 5254170 (1993-10-01), Devibiss et al.
patent: 5259881 (1993-11-01), Edwards et al.
patent: 5259883 (1993-11-01), Yamabe et al.
patent: 5261935 (1993-11-01), Ishii et al.
patent: 5288379 (1994-02-01), Namiki et al.
patent: 5292393 (1994-03-01), Maydan et al.
patent: 5352294 (1994-10-01), White et al.
patent: 5355066 (1994-10-01), Lowrance
patent: 5374147 (1994-12-01), Hiroki et al.
patent: 5376212 (1994-12-01), Saiki
patent: 5404894 (1995-04-01), Shiraiwa
patent: 5421889 (1995-06-01), Pollock et al.
patent: 5443346 (1995-08-01), Murata et al.
patent: 5445484 (1995-08-01), Kato et al.
patent: 5447409 (1995-09-01), Grunes et al.
patent: 5464313 (1995-11-01), Ohsawa
patent: 5469035 (1995-11-01), Lowrance
patent: 5470784 (1995-11-01), Coleman
patent: 5474410 (1995-12-01), Ozawa et al.
patent: 5512320 (1996-04-01), Turner et al.
patent: 5516732 (1996-05-01), Flegal
patent: 5535908 (1996-07-01), Sheu
patent: 5536128 (1996-07-01), Shimoyashiro et al.
patent: 5558482 (1996-09-01), Hiroki et al.
patent: 5562383 (1996-10-01), Iwai et al.
patent: 5570994 (1996-11-01), Somekh et al.
patent: 5586585 (1996-12-01), Bonora et al.
patent: 5588827 (1996-12-01), Muka
patent: 5607009 (1997-03-01), Turner et al.
patent: 5609689 (1997-03-01), Kato et al.
patent: 5611655 (1997-03-01), Fukasawa et al.
patent: 5611865 (1997-03-01), White et al.
patent: 5615988 (1997-04-01), Wiesler et al.
patent: 5616208 (1997-04-01), Lee
patent: 5636964 (1997-06-01), Somekh et al.
patent: 5655277 (1997-08-01), Galdos et al.
patent: 5674786 (1997-10-01), Turner et al.
patent: 5685684 (1997-11-01), Kato et al.
patent: 5695568 (1997-12-01), Sinha et al.
patent: 5697749 (1997-12-01), Iwabuchi et al.
patent: 5700127 (1997-12-01), Harada et al.
patent: 5716207 (1998-02-01), Mishina et al.
patent: 5738767 (1998-04-01), Coad et al.
patent: 5751003 (1998-05-01), Rose et al.
patent: 5784799 (1998-07-01), Kato et al.
patent: 5793050 (1998-08-01), Rose et al.
patent: 5795355 (1998-08-01), Moran
patent: 5820679 (1998-10-01), Yokoyama et al.
patent: 5833426 (1998-11-01), Marohl
patent: 5855681 (1999-01-01), Maydan et al.
patent: 5855726 (1999-01-01), Soraoka et al.
patent: 5882165 (1999-03-01), Maydan et al.
patent: 5884009 (1999-03-01), Okase
patent: 5891251 (1999-04-01), MacLeish et al.
patent: 5902088 (1999-05-01), Faribairn et al.
patent: 5909994 (1999-06-01), Blum et al.
patent: 5913978 (1999-06-01), Kato et al.
patent: 5934856 (1999-08-01), Asakawa et al.
patent: 5942013 (1999-08-01), Akimoto
patent: 5944857 (1999-08-01), Edwards et al.
patent: 5951770 (1999-09-01), Perlov et al.
patent: 5954472 (1999-09-01), Hofmeister et al.
patent: 5961269 (1999-10-01), Kroeker
patent: 5989346 (1999-11-01), Hiroki
patent: 5997235 (1999-12-01), Hofmeister
patent: 6007675 (1999-12-01), Toshima
patent: 6012192 (2000-01-01), Sawada et al.
patent: 6016611 (2000-01-01), White et al.
patent: 6034000 (2000-03-01), Heyder et al.
patent: 6039770 (2000-03-01), Yang et al.
patent: 6042623 (2000-03-01), Edwards
patent: 6044534 (2000-04-01), Seo et al.
patent: 6048154 (2000-04-01), Wytman
patent: 6059507 (2000-05-01), Adams
patent: 6079693 (2000-06-01), Ettinger et al.
patent: 6082950 (2000-07-01), Altwood et al.
patent: 6086362 (2000-07-01), White et al.
patent: 6106634 (2000-08-01), Ghanayem et al.
patent: 6143083 (2000-11-01), Yonemitsu et al.
patent: 6145673 (2000-11-01), Burrows et al.
patent: 6176667 (2001-01-01), Fairbairn et al.
patent: 6176668 (2001-01-01), Kurita et al.
patent: 6186722 (2001-02-01), Shirai
patent: 6193507 (2001-02-01), White et al.
patent: 6206176 (2001-03-01), Blonigan
patent: 6213704 (2001-04-01), White et al.
patent: 6215897 (2001-04-01), Beer et al.
patent: 6224680 (2001-05-01), Toshima
patent: 6234107 (2001-05-01), Tanaka et al.
patent: 6235634 (2001-05-01), White et al.
patent: 6254328 (2001-07-01), Wytman
patent: 6270582 (2001-08-01), Rivkin et al.
patent: 6286230 (2001-09-01), White et al.
patent: 6315512 (2001-11-01), Tabrizi et al.
patent: 6318945 (2001-11-01), Hofmeister
patent: 6338626 (2002-01-01), Saeki
patent: 6340405 (2002-01-01), Park
patent: 6382895 (2002-05-01), Konishi et al.
patent: 6405423 (2002-06-01), Donde
patent: 6410455 (2002-06-01), Kuribayashi et al.
patent: 6431807 (2002-08-01), Stevens et al.
patent: 6435868 (2002-08-01), White et al.
patent: 6450750 (2002-09-01), Heyder et al.
patent: 6486444 (2002-11-01), Fairbairn et al.
patent: 6503365 (2003-01-01), Kim et al.
patent: 6517303 (2003-02-01), White et al.
patent: 6551045 (2003-04-01), Binnard et al.
patent: 6558509 (2003-05-01), Kraus et al.
patent: 6568552 (2003-05-01), Tabrizi et al.
patent: 6568899 (2003-05-01), Kuribayashi et al.
patent: 6602797 (2003-08-01), Kuribayashi et al.
patent: 6609869 (2003-08-01), Aggarwal et al.
patent: 6610150 (2003-08-01), Savage et al.
patent: 6647665 (2003-11-01), Tabrizi et al.
patent: 6881305 (2005-04-01), Black et al.
patent: 6902624 (2005-06-01), Seidel et al.
patent: 6949143 (2005-09-01), Kurita et al.
patent: 7104535 (2006-09-01), Kurita et al.
patent: 7207766 (2007-04-01), Kurita et al.
patent: 7375041 (2008-05-01), Jang
patent: 2002/0034886 (2002-03-01), Kurita et al.
patent: 2002/0061243 (2002-05-01), Binnard et al.
patent: 2002/0108571 (2002-08-01), Black et al.
patent: 2002/0137346 (2002-09-01), Donaldson et al.
patent: 2002/0159864 (2002-10-01), Lowrance
patent: 2002/0178562 (2002-12-01), Aoki et al.
patent: 2004/0149210 (2004-08-01), Fink
patent: 2005/0095088 (2005-05-01), Kurita et al.
patent: 2005/0111936 (2005-05-01), Kim et al.
patent: 2005/0150757 (2005-07-01), Black et al.
patent: 2006/0021992 (2006-02-01), Narushima et al.
patent: 2006/0103076 (2006-05-01), Hashimoto
patent: 2006/0182534 (2006-08-01), Hiroki
patent: 2006/0245852 (2006-11-01), Iwabuchi
patent: 2007/0237608 (2007-10-01), Jang et al.
patent: 0359525 (1990-03

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