Deconvolving tip artifacts using multiple scanning probes

Details Deconvolving tip artifacts using multiple scanning probes Deconvolving tip artifacts using multiple scanning probes

2006-03-20

2008-08-26

Cygan, Michael (Department: 2855)

Measuring and testing

Surface and cutting edge testing

Roughness

C250S306000, C250S307000

Reexamination Certificate

active

07415868

ABSTRACT:
The present invention comprises an apparatus and a method for using multiple scanning probes to deconvolve tip artifacts in scanning probe microscopes and other scanning probe systems. The invention uses multiple scanning probe tips of different geometries or orientations to scan a feature, such as a semiconductor line or trench, and to display the scan data such that tip artifacts from each tip can be omitted from the measurement by data from the other tips.

REFERENCES:
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patent: 6684686 (2004-02-01), Itsuji et al.
patent: 6951130 (2005-10-01), Hare et al.
patent: 2002/0189330 (2002-12-01), Mancevski et al.
patent: 2004/0025578 (2004-02-01), Hare et al.
patent: 2007/0022804 (2007-02-01), Kley

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