Deconvolving far-field images using scanned probe data

Details Deconvolving far-field images using scanned probe data Deconvolving far-field images using scanned probe data

2005-05-31

2005-05-31

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

Reexamination Certificate

active

06900435

ABSTRACT:
A method for deconvolving far-field optical images beyond the diffraction limit includes the use of near-field optical and other scanned probe imaging data to provide powerful and new constraints for the deconvolution of far-field data sets. Near-field data, such as that which can be obtained from atomic force microscopy on a region of the far-field data set in an integrated and inter-digitate way, is used to produce resolutions beyond the diffraction limit of the lens that is being used. In the case of non-linear optical imaging or other microscopies, resolutions beyond that which is achievable with these microscopies can be obtained.

REFERENCES:
patent: 5453844 (1995-09-01), George et al.
patent: 5724259 (1998-03-01), Seymour et al.
patent: 6775349 (2004-08-01), Schotland et al.

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