DC or HF ion source

Details DC or HF ion source DC or HF ion source

1993-08-12

1994-11-29

Breneman, R. Bruce

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

250423R, 20429805, H01J 2702

Patent

active

053693370

ABSTRACT:
A DC or high frequency ion source comprising a hollow cathode and a substantially hollow anode for applying a DC or alternating voltage; a gas inlet disposed at a first side of the cathode for supplying a discharge gas into the cathode; a cathode heater disposed between the anode and the cathode; a magnet disposed adjacent the anode to thereby improve the uniformity of a plasma; an ion extraction outlet disposed at a second side of the cathode opposite to the gas inlet and having an elongated rectangular shape; and an ion extraction electrode and an acceleration electrode for controlling the energy of extracted ions. Both the anode and cathode comprise substantially hollow boxes. The cathode includes an elongated rectangular cross section and is disposed inside the substantially hollow anode. The ion extraction electrode and the acceleration electrode have an elongated rectangular shape and an opening coextensive with the ion extraction outlet. The ion extraction electrode and the acceleration electrode are disposed adjacent, and aligned with, the ion extraction outlet. The ion source can be formed with an arcuate shape to accommodate round objects. The ion source can also be formed integrally with a sputtering device.

REFERENCES:
patent: 4841197 (1989-06-01), Takayama et al.
patent: 4954751 (1990-09-01), Kaufman et al.

Affiliated with

Also associated with

Rating

DC or HF ion source does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with DC or HF ion source, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and DC or HF ion source will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-75884