Data tracking method and system applied in semiconductor...

Details Data tracking method and system applied in semiconductor... Data tracking method and system applied in semiconductor...

2006-12-21

2008-10-07

Decady, Albert (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S103000, C700S121000, C705S002000

Reexamination Certificate

active

07433750

ABSTRACT:
A data tracking method applied in semiconductor manufacturing is provided. Split historical data of a wafer lot is retrieved and it is determined whether the end of lot data of the wafer lot is read. If not, a maximum split number required for a split processing applied to the wafer lot is determined. Next, a virtual sub split number required for the current process station is determined according to the maximum split number and a current split number. At least one virtual sub lot for the current process station is created according to the virtual sub split number. Process data of an original wafer lot corresponding to the virtual sub lot is copied to the virtual sub lot and virtual sub lots for the next process station is continuously created when creation is complete.

REFERENCES:
patent: 5889674 (1999-03-01), Burdick et al.
patent: 6615096 (2003-09-01), Durrant et al.
patent: 7266417 (2007-09-01), Liao

Affiliated with

Also associated with

Rating

Data tracking method and system applied in semiconductor... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Data tracking method and system applied in semiconductor..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Data tracking method and system applied in semiconductor... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3993544