Data storage module suspension system

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation

Reexamination Certificate

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Details

C257S415000, C257SE29324, C369S101000, C369S127000, C369S213000, C365S118000

Reexamination Certificate

active

07148549

ABSTRACT:
A micro-electro-mechanical device includes a moveable mass supported within a frame. To support the mass within the frame, a first flexure extends between the mass and the frame. An angle softening element is positioned between a first end of the first flexure and the frame to allow angular movement of the first flexure.

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