Dark field inspection system

Details Dark field inspection system Dark field inspection system

2003-09-08

2008-03-04

Nguyen, Sang H. (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237400, C356S237500, C356S394000, C250S234000

Reexamination Certificate

active

07339661

ABSTRACT:
Apparatus for inspection of a sample includes a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample, and a plurality of image sensors. Each of the image sensors is configured to receive the radiation scattered from the area into a different, respective angular range, so as to form respective images of the area. An image processor is adapted to process at least one of the respective images so as to detect a defect on the surface.

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