Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Reexamination Certificate
2007-02-13
2007-02-13
Smoot, Stephen W. (Department: 2813)
Active solid-state devices (e.g., transistors, solid-state diode
Test or calibration structure
C257S538000, C257SE23164
Reexamination Certificate
active
10920936
ABSTRACT:
A linewidth measurement structure for determining linewidths of damascened metal lines formed in an insulator is provided. The linewidth measurement structure including: a damascene polysilicon line formed in the insulator, the polysilicon line having an doped region having a predetermined resistivity.
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International Business Machines - Corporation
Sabo William D.
Schmeiser Olsen & Watts
Smoot Stephen W.
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