Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2006-01-31
2006-01-31
Tran, Minhloan (Department: 2826)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S303000, C257S304000, C257S306000, C257S310000, C257S324000, C257S397000, C257S532000
Reexamination Certificate
active
06992344
ABSTRACT:
The invention is directed to unique high-surface area BEOL capacitor structures with high-k dielectric layers and methods for fabricating the same. These high-surface area BEOL capacitor structures may be used in analog and mixed signal applications. The capacitor is formed within a trench with pedestals within the trench to provide additional surface area. The top and bottom electrodes are created using damascene integration scheme. The dielectric layer is created as a multilayer dielectric film comprising for instance Al2O3, Al2O3/Ta2O5, Al2O3/Ta2O5/Al2O3and the like. The dielectric layer may be deposited by methods like atomic layer deposition or chemical vapor deposition. The dielectric layer used in the capacitor may also be produced by anodic oxidation of a metallic precursor to yield a high dielectric constant oxide layer.
REFERENCES:
patent: 6075691 (2000-06-01), Duenas et al.
patent: 6320244 (2001-11-01), Alers et al.
patent: 6323084 (2001-11-01), Hyun et al.
patent: 6329234 (2001-12-01), Ma et al.
patent: 6341056 (2002-01-01), Allman et al.
patent: 6344413 (2002-02-01), Zurcher et al.
patent: 6373087 (2002-04-01), Harris et al.
patent: 2002/0176989 (2002-11-01), Knudsen et al.
patent: 2003/0139017 (2003-07-01), Park
patent: 451469 (2001-08-01), None
patent: 507313 (2002-10-01), None
Coolbaugh Douglas D.
Cotte John M.
Eshun Ebenezer E.
Stein Kenneth J.
Vaed Kunal
DeLio & Peterson LLC
Tran Minhloan
Tran Tan
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