Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2006-06-20
2006-06-20
Chaudhari, Chandra (Department: 2891)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C438S382000
Reexamination Certificate
active
07064023
ABSTRACT:
D/A conversion having higher accuracy is provided by improving relative accuracy of the resistance value of resistors which configure a resistor string. A manufacturing method of a D/A converter circuit of the invention comprises the steps of: forming a resistor string11which includes a plurality of resistors R0to R7connected in series with each other between reference voltages, and a plurality of switching elements S0to S3connected with each connection node of the resistors R0to R7,wherein: each of the resistors R0to R7is a thin film element crystallized by linear laser irradiation; disposing all forming parts of the resistors configuring the resistor string11within a laser irradiation area19;and crystallizing all the forming parts of the resistors which are disposed within the laser irradiation area with the same laser shot.
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Koyama Jun
Miyake Hiroyuki
Miyata Kazuhiko
Takahashi Kei
Chaudhari Chandra
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Semiconductor Energy Laboratory Co,. Ltd.
Sharp Kabushiki Kaisha
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