Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1982-06-14
1983-03-08
Demers, Arthur P.
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
204298, C23C 1500
Patent
active
043760252
ABSTRACT:
In this cylindrical, magnetically-enhanced, sputtering cathode, the magnetic field at the cathode target is generated by applying an electric current through a hollow electrical conductor disposed within a tubular target, so that the electric current flowing along this conductor induces circular magnetic lines concentrically around its axis. By biasing negatively the tubular target immersed in a low pressure gas, a glow discharge is generated. Electrons, emitted from the target surface are accelerated radially by the electric field, but deviated perpendicularly by the magnetic field. The resulting motion is confined in a spirally-shaped area centered on the conductor axis.
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Battelle Development Corporation
Bissell Barry S.
Demers Arthur P.
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