Cyclic carbonate compounds, method for producing the same and po

Details Cyclic carbonate compounds, method for producing the same and po Cyclic carbonate compounds, method for producing the same and po

1993-04-09

1995-03-14

Dote, Janis L.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430326, 430905, 430909, 430920, 430921, G03C 1492, G03F 7004

Patent

active

053976797

ABSTRACT:
This invention provides a process for producing a cyclic carbonate compound represented by the following formula (5): ##STR1## or the like which is useful as a dissolution inhibitor for use in a chemically amplified positive photoresist, as well as a positive photoresist composition comprising said cyclic carbonate compound, an alkali-soluble resin and a photo-induced acid precursor. This composition gives a positive photoresist excellent in performances such as resolution, profile, sensitivity, etc.

REFERENCES:
patent: 5130225 (1992-07-01), Uetani
patent: 5242734 (1994-08-01), Lazarus et al.
The Japan Society of Applied Physics and Related Societies, The 38th Spring Meeting, Mar. 1991, (29a-ZC-7).
The Japan Society of Applied Physics and Related Societies, The 38th Spring Meeting, Mar. 1991, (30a-ZA-3).

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