Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1987-11-27
1989-02-21
Louie, Won H.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430192, 430176, 549448, 549454, 549370, 549375, 549 6, 544215, G03C 1495, C07D40514, C07D40712, C07D40714
Patent
active
048064483
ABSTRACT:
Compounds of formula I ##STR1## in conjunction with compounds that donate acid when exposed to actinic radiation, are suitable for use as positive photoresists. In formula I, R.sup.1 and R.sup.2 are hydrogen, alkyl, aryl, cycloalkyl, aralkyl or alkaryl, R.sup.3 to R.sup.8 are hydrogen or lower alkyl, X is --O-- or --NR.sup.9 --, where R.sup.9 is hydrogen or C.sub.1 -C.sub.4 alkyl n is 0 or 1, m is 2, 3 or 4 and Q is an organic radical of valency m.
The photoresists are suitable for making printing formes, printed circuits, integrated circuits or silver-free photographic films.
REFERENCES:
patent: 4101323 (1976-07-01), Buhr et al.
patent: 4189323 (1980-02-01), Buhr
patent: 4247611 (1981-06-01), Sander et al.
patent: 4248957 (1981-02-01), Sander et al.
patent: 4250247 (1981-02-01), Sander et al.
Ciba-Geigy Corporation
Hall Luther A. R.
Hamilton Cynthia
Louie Won H.
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