Cycle purging a vacuum chamber during bakeout process

Details Cycle purging a vacuum chamber during bakeout process Cycle purging a vacuum chamber during bakeout process

1997-09-02

1999-03-09

El-Arini, Zeinab

Cleaning and liquid contact with solids

Processes

Including work heating or contact with combustion products

134 21, 134 221, 134 2215, 134 2218, 134 30, 134 37, B08B 502, B08B 504, B08B 900

Patent

active

058794670

ABSTRACT:
A vacuum system bakeout process is performed by cycling the system between two pressures, pumping the system down to a lower pressure, and holding the system at that lower pressure for a period of time. A gas, such as argon gas, is introduced into the system. This gas introduction is done while cycling between the two pressures. The pump is used to lower the pressure during cycling, and the gas flow is used to raise the pressure. A rough pump performs the cycling between pressures, and then a high vacuum pump evacuates the system to the lower pressure.

REFERENCES:
patent: 4873833 (1989-10-01), Pfeiffer et al.
patent: 5433639 (1995-07-01), Zahuta et al.
patent: 5536330 (1996-07-01), Chen et al.
patent: 5678759 (1997-10-01), Grenci et al.

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