CVD reactor with graphite-foam insulated, tubular susceptor

Details CVD reactor with graphite-foam insulated, tubular susceptor CVD reactor with graphite-foam insulated, tubular susceptor

2006-05-23

2006-05-23

Kackar, Ram N (Department: 1763)

Coating apparatus

Gas or vapor deposition

With treating means

C118S728000, C156S345520, C219S444100, C219S544000, C219S607000, C392S416000, C392S418000, C427S585000, C427S591000, C427S249150, C117S200000

Reexamination Certificate

active

07048802

ABSTRACT:
The invention relates to a device for depositing especially crystalline layers on especially crystalline substrates by means of reaction gases fed to a heated process chamber. Said process chamber is formed by the cavity of an especially multi-part graphite tube arranged in a reactor housing that especially comprises quartz walls. Said reactor housing, in the area of the process chamber, is enclosed by a high-frequency coil and the space between the reactor housing wall and the graphite tube is filled with a graphite foam sleeve. In order to improve heat insulation, the graphite foam sleeve is fully slit. The slot is wider than the maximum thermal elongation of the graphite foam sleeve in the peripheral direction to be expected when the device is heated up to process temperature.

REFERENCES:
patent: 4259278 (1981-03-01), Flegel et al.
patent: 4512391 (1985-04-01), Harra
patent: 4927345 (1990-05-01), Takei et al.
patent: 5879462 (1999-03-01), Kordina et al.
patent: 6390019 (2002-05-01), Grimbergen et al.
patent: 0 746 009 (1996-12-01), None
patent: 1 334 222 (2001-10-01), None
patent: 60137893 (1985-07-01), None
patent: 90/13687 (1990-11-01), None
patent: WO 90/13687 (1990-11-01), None
patent: WO 99/43874 (1999-09-01), None

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