Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Patent
1996-03-12
2000-03-28
King, Roy V.
Coating processes
Direct application of electrical, magnetic, wave, or...
Plasma
4272498, 42724911, 4272555, 4272557, 427309, 4273722, 427573, B05D 306, C23C 1626
Patent
active
060429003
ABSTRACT:
Method is provided for forming CVD nano diamond films for use as cold cathodes in microelectronic devices. Conditions for forming the film outside the plasma region between the cathode and a grid anode are disclosed. Heating of the grid anode makes possible a combination of glow discharge and hot filament deposition.
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Rakhimov Alexander Tursonovich
Rezunenko Vladimir Ivanovich
Suetin Nikolay Vladislavovich
Timofeyev Mikhail Arkadievich
Tugarev Valentin Akimovich
King Roy V.
Rakhimov Alexander
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