Curved X-ray reflector

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis

Reexamination Certificate

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Details

C378S070000

Reexamination Certificate

active

07415096

ABSTRACT:
A method for producing X-ray optics includes providing a wafer of crystalline material having front and rear surfaces and a lattice spacing suitable for reflecting incident X-rays of a given wavelength. A thin film is deposited on the front surface of the wafer so as to generate compressive forces in the thin film sufficient to impart a concave curvature to the rear surface of the wafer with at least one radius of curvature selected for focusing the incident X-rays.

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Hoffman, et al., “Internal Stresses in Cr, Mo, Ta, and Pt Films Deposited by Sputtering from a Planar Magnetron Source”, Journal of Vacuum Science and Technology 20:3, Mar. 1982, pp. 355-358.
Shen, et al., “Stresses, Curvatures, and Shape Changes Arising from Patterned Lines on Silicon Wafers”, Journal of Applied Physics 80:3, Aug. 1996, pp. 1388-1398.
U.S. Appl. No. 60/702,783, filed Jul. 26, 2005.

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