Curved micromachined ultrasonic transducer arrays and...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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Reexamination Certificate

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10749645

ABSTRACT:
A curved sensor device, such as an ultrasonic transducer array, is fabricated from a flat micromachined sensor (such as cMUT or pMUT) array constructed using micromachined electro-mechanical systems (MEMS) techniques. The device comprises: a support structure comprising a spine having a profile that is generally curved and a multiplicity of teeth extending from one side of the curved spine; and a multiplicity of sensors built on the support structure. The spine can be bent forward or backward and attached to a curved front face of a support member, thereby causing the sensors to adopt a curved array.

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Jin et al., “Micromachined Capacitive Transducer Arrays for Medical Ultrasoind Imaging”, 1998 IEEE Ultrasonics Symposium, pp. 1877-1880.
Ladabaum et al., “Surface Micromachined Capacitive Ultrasonic Transducers”, IEEE Trans. Ultrasonics, Ferroelectrics, and Frequency Control, vol. 45, No. 3 (May 1998), pp. 678-690.

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