Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate
2005-06-14
2005-06-14
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
C355S053000, C355S072000
Reexamination Certificate
active
06906334
ABSTRACT:
An actuator has a pair of electromagnets and a curved magnetic member that is magnetically coupled to the electromagnets. The magnetic force acting on the curved magnetic member has less of a tendency to induce torque to the table than a straight magnetic member, because the geometry of the magnetic force between the curved magnetic member and electromagnets remain relatively unchanged over the permitted range of movement of the magnetic member.
REFERENCES:
patent: 5294854 (1994-03-01), Trumper
patent: 5473410 (1995-12-01), Nishi
patent: 5528118 (1996-06-01), Lee
patent: 5874820 (1999-02-01), Lee
patent: 5949161 (1999-09-01), Nanba
patent: 6069417 (2000-05-01), Yuan et al.
patent: 6281655 (2001-08-01), Poon et al.
patent: 6307285 (2001-10-01), Delson et al.
patent: 6313551 (2001-11-01), Hazelton
patent: 6323494 (2001-11-01), Lee
patent: 6323567 (2001-11-01), Hazelton et al.
patent: 6472777 (2002-10-01), Teng et al.
patent: 6486941 (2002-11-01), Hazelton et al.
patent: 6570645 (2003-05-01), Korenaga et al.
patent: 2002/0048009 (2002-04-01), Kwan
patent: WO01/81171 (2001-11-01), None
Liu & Liu
Nikon Corporation
Quash Anthony
Wells Nikita
LandOfFree
Curved I-core does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Curved I-core, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Curved I-core will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3492088