Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1990-04-26
1992-06-16
Hamilton, Cynthia
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430906, 430281, 522142, 525426, G03F 7075
Patent
active
051224364
ABSTRACT:
A curable composition which comprises a homogeneous blend of (a) a solvent soluble polyimidesiloxane containing about 0.2-30 weight percent silicon and (b) an ethylenically unsaturated multifunctional monomer. The siloxane units in the polyimide-siloxane have from 10 to about 200 ##STR1## linkages per unit, more preferably from about 15 to about 100 linkages, and most preferably from about 40 to about 60 ##STR2## linkages per siloxane unit. Another embodiment provides the composition produced by curing the above-described composition. The curable compositions of this invention can be cured by either actinic radiation, e.g., uv light, or thermal radiation. In the cured composition, the polymer produced upon polymerization of the monomer, and the polyimide portion of the polyimide-siloxane form a homogeneous blend, in which the siloxane portion of the polyimide-siloxane is phase separated. The cured composition is a polymer network, and is particularly useful as a negative-working resist in the fabrication of electronic devices such as integrated circuit (IC) chips. The cured composition reduced stress at the polymer/metal interface of coated objects, thereby reducing curl in thin, coated objects.
REFERENCES:
patent: 3620736 (1971-11-01), Tarkington
patent: 3748133 (1973-07-01), Noonan et al.
patent: 4147552 (1979-04-01), Specht et al.
patent: 4247623 (1981-01-01), Guild
patent: 4289844 (1981-09-01), Specht et al.
patent: 4342151 (1982-08-01), Guild
patent: 4499149 (1985-02-01), Berger
patent: 4670497 (1987-06-01), Lee
patent: 4727126 (1988-02-01), Chen
patent: 4767883 (1988-08-01), Molaire
patent: 4803147 (1989-02-01), Mueller et al.
patent: 4853452 (1989-08-01), Lee
patent: 4996278 (1991-02-01), Lee
Summers et al, Polymer Preprints 27, 403-405 (1986).
Yilgor et al, Polysiloxane Containing Polymers: A Survey of Recent Developments in "Polysiloxane Copolymers/Anionic Polymerization" Springer-Verlag, Berlin, W.Ger. (1988).
Iskender Vilgor, Polymer Sci. Tech. 37 Adhesives: Sealants, Coatings, Space Harsh Environment, pp. 249-264 (1988).
Fitzgerald John J.
Tunney Scott E.
Eastman Kodak Company
Hamilton Cynthia
Walker Robert Luke
LandOfFree
Curable composition does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Curable composition, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Curable composition will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1753159