Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1991-04-04
1993-05-04
Kunemund, Robert
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
148562, 156612, 156613, 156614, 156DIG111, 437 11, 437 89, 437100, 437173, C30B 2500
Patent
active
052078639
ABSTRACT:
A crystal growth method for crystallizing an amorphous thin film comprises heat-treating an amorphous thin film having a region (I) with a predetermined film thickness and a region (II) with a larger film thickness than the region (I) and having a sufficiently small area so as to form only a single nucleus from which a single crystal is grown by solid phase growth at a temperature not higher than the melting point of the film.
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T. Noguchi, et al. "Polysilicon Super Thin Film Transistor Technology," Materials Research Society Symposium Proceedings, vol. 106, Polysilicon and Interfaces, pp. 293-304 (1988).
Canon Kabushiki Kaisha
Garrett Felisa
Kunemund Robert
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