Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1988-06-27
1989-10-03
Dees, JoseG.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430324, 430329, G03C 500
Patent
active
048716510
ABSTRACT:
This invention is directed to a process for the cryogenic lift-off of metal/resist material from a surface of a substrate.
REFERENCES:
patent: 4631250 (1986-12-01), Hayashi
patent: 4662989 (1987-05-01), Casey et al.
Bailey Robert S.
McCune, Jr. Robert C.
Toth Louis
Dees Jose'G.
Ford Motor Copmpany
May Roger L.
Melotik Lorraine S.
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