Cryogenic/phase change cooling for rapid thermal process systems

Details Cryogenic/phase change cooling for rapid thermal process systems Cryogenic/phase change cooling for rapid thermal process systems

1999-03-18

2000-08-22

Gravini, Stephen

Drying and gas or vapor contact with solids

Process

Retarding or shielding of treatment

34310, 34340, 34357, 34428, 134 7, 62 502, F26B 700

Patent

active

061052744

ABSTRACT:
A process for treating a workpiece. The workpiece is cooled by directing toward the workpiece a material that includes a gas and particles of a material that undergoes a phase change when applied to the workpiece. The gas and the particle material are non-reactive with the workpiece during the cooling.

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