Cross purge valve and container assembly

Details Cross purge valve and container assembly Cross purge valve and container assembly

2011-08-23

2011-08-23

Chiesa, Richard L (Department: 1776)

Gas and liquid contact apparatus

Fluid distribution

Valved

C137S560000, C141S098000, C261S052000, C261S063000, C261S064100, C261S121100

Reexamination Certificate

active

08002247

ABSTRACT:
The present invention is a quartz bubbler container with cross purge capability. This cross purge allows the user to easily purge air and chemical from the valve inlet and outlet by simply flowing inert gas, and avoids the requirement for a more complicated vacuum purging apparatus. The design incorporates two small footprint 3-way valves mounted on the bubbler container inlet and outlet connectors. The 3rdport of each valve is piped together between the valves with a crosspurge line. The valves are corrosion resistant, leak free, maintenance free, non-leaching of impurities, and can accommodate an optional breakseal crusher that will perforate quartz break seals (on the inlet and outlet of ampoule). Liquid out containers of various materials of construction are also contemplated.

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