Cross-coupled capacitors for improved voltage coefficient

Details Cross-coupled capacitors for improved voltage coefficient Cross-coupled capacitors for improved voltage coefficient

1997-10-20

2000-05-30

Whitehead, Jr., Carl

Semiconductor device manufacturing: process

Making passive device

Planar capacitor

438239, 438250, 438253, 438381, 438396, H01L 2120

Patent

active

06069050&

ABSTRACT:
A capacitor having a low voltage coefficient, even though one electrode is a semiconductor and one is a metal, is described. Two parallel plate capacitors are formed side by side and then cross-connected. The bottom plate of one of the capacitors is connected to the top plate of the other capacitor, and vice versa. This arrangement causes the two capacitors to be polarized in opposite directions at all times so that the individual voltage coefficients cancel each other and give the combined structure a value that is about 2 ppm/V. A process for manufacturing this capacitor is also described.

REFERENCES:
patent: 4731696 (1988-03-01), Himes et al.
patent: 5016070 (1991-05-01), Sundaresan
patent: 5179033 (1993-01-01), Adan
patent: 5324961 (1994-06-01), Rodder
patent: 5347152 (1994-09-01), Sundaresan
patent: 5389832 (1995-02-01), Boerstler et al.
patent: 5521111 (1996-05-01), Sato

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